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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 7 February 2015)] MOEMS and Miniaturized Systems XIV - Piezoelectrically driven translatory optical MEMS actuator with 7mm apertures and large displacements
Piyawattanametha, Wibool, Park, Yong-Hwa, Quenzer, H.- J., Gu-Stoppel, S., Stoppel, F., Janes, J., Hofmann, U., Benecke, W.Volume:
9375
Année:
2015
Langue:
english
DOI:
10.1117/12.2077101
Fichier:
PDF, 667 KB
english, 2015