[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Simulation and Characterization of the Strain Induced by an Original "Embedded Buried Nitride" Technique
Baudot, Sophie, Andrieu, Francois, Kostrzewa, Marek, Widiez, Julie, Barbe, Jean-Charles, Faynot, Olivier, Lamrani, Younes, Vizioz, Christian, Brevard, Laurent, Denis, Herve, Delaye, Vincent, Rieutord,Année:
2009
Langue:
english
DOI:
10.1149/1.3117390
Fichier:
PDF, 2.00 MB
english, 2009