SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, United States (Sunday 17 August 2014)] Nanostructured Thin Films VII - The effect of the substrate temperature and the acceleration potential drop on the structural and physical properties of SiC thin films deposed by TVA method
Lakhtakia, Akhlesh, Mackay, Tom G., Suzuki, Motofumi, Ciupina, Victor, Lungu, Cristian P., Vladoiu, Rodica, Prodan, Gabriel C., Antohe, Stefan, Porosnicu, Corneliu, Stanescu, Iuliana, Jepu, Ionut, IftVolume:
9172
Année:
2014
Langue:
english
DOI:
10.1117/12.2061186
Fichier:
PDF, 1.11 MB
english, 2014
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