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Enhanced Gold Diffusion in Silicon under Intrinsic Point Defect Flow
Koveshnikov, Sergei V., Yakimov, E.B., Yarykin, NikolaiVolume:
103-105
Année:
1993
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/ddf.103-105.227
Fichier:
PDF, 363 KB
1993