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Limitation induced by electrical charges effects on micromechanisms
C Guerret-Piécourt, J Vallayer, D TréheuxVolume:
254
Année:
2003
Langue:
english
Pages:
9
DOI:
10.1016/s0043-1648(03)00299-0
Fichier:
PDF, 258 KB
english, 2003