RBS and optical studies of ion-implanted amorphous silicon carbide layers
J. Romanek, A.P. Kobzev, M. Kulik, T. Tsvetkova, J. ŻukVolume:
70
Année:
2003
Langue:
english
Pages:
9
DOI:
10.1016/s0042-207x(02)00687-5
Fichier:
PDF, 170 KB
english, 2003