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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MOEMS Display, Imaging, and Miniaturized Microsystems IV - Extended damping model for out-of-plane comb driven micromirrors
Klose, Thomas, Sandner, Thilo, Schenk, Harald, Lakner, Hubert, Ürey, Hakan, Dickensheets, David L., Gogoi, Bishnu P.Volume:
6114
Année:
2006
Langue:
english
DOI:
10.1117/12.645981
Fichier:
PDF, 1.03 MB
english, 2006