
Water as reactive gas to prepare titanium oxynitride thin films by reactive sputtering
Jean-Marie Chappé, Nicolas Martin, Guy Terwagne, Jan Lintymer, Joseph Gavoille, Jamal TakadoumVolume:
440
Année:
2003
Langue:
english
Pages:
8
DOI:
10.1016/s0040-6090(03)00832-0
Fichier:
PDF, 906 KB
english, 2003