Fabrication of amorphous carbon nitride films by hot-wire chemical vapor deposition
Haruo Yokomichi, Atsushi Masuda, Naoki KishimotoVolume:
395
Année:
2001
Langue:
english
Pages:
4
DOI:
10.1016/s0040-6090(01)01264-0
Fichier:
PDF, 95 KB
english, 2001