Development of roll-to-roll hot embossing system with induction heater for micro fabrication
Yun, Dongwon, Son, Youngsu, Kyung, Jinho, Park, Heechang, Park, Chanhun, Lee, Sunghee, Kim, ByunginVolume:
83
Année:
2012
Langue:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3675574
Fichier:
PDF, 2.14 MB
english, 2012