SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - Variable angle spectroscopic ellipsometry in the vacuum ultraviolet
Woollam, John A., Hilfiker, James N., Tiwald, Thomas E., Bungay, Corey L., Synowicki, Ron A., Meyer, Duane E., Herzinger, Craig M., Pfeiffer, Galen L., Cooney, Gerald T., Green, Steven E., Al-Jumaily,Volume:
4099
Année:
2000
Langue:
english
DOI:
10.1117/12.405820
Fichier:
PDF, 1.21 MB
english, 2000