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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Evaluation of Novel Sr Precursors for Atomic Layer Deposition of SrO Thin Film
Kim, Ki-Chul, Cho, Kyuho, Lee, Kwanghee, Kim, Younsoo, Choi, Jae H., Lim, Jae-Soon, Kim, Jin Y., Kim, Wan-Don, Kwon, Oh S., Tak, Yong S., Chung, Jeong-Hee, Kim, Young-Sun, Kim, Sung-Tae, Han, WoosungVolume:
11
Année:
2007
Langue:
english
DOI:
10.1149/1.2779077
Fichier:
PDF, 378 KB
english, 2007