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Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma
Lee, Hyo-Chang, Lee, Jung-Kyu, Chung, Chin-WookVolume:
17
Année:
2010
Langue:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.3361199
Fichier:
PDF, 127 KB
english, 2010