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Experimental investigation of edge-to-center density ratio in inductively coupled plasmas
Kim, Gun-Ho, Lee, Hyo-Chang, Chung, Chin-WookVolume:
17
Année:
2010
Langue:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.3456517
Fichier:
PDF, 258 KB
english, 2010