Scheduling and Analysis of Start-Up Transient Processes for Dual-Arm Cluster Tools With Wafer Revisiting
Pan, Chun Rong, Qiao, Yan, Zhou, Meng Chu, Wu, Nai QiVolume:
28
Langue:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2015.2390644
Date:
May, 2015
Fichier:
PDF, 1.22 MB
english, 2015