
Effect of aluminum addition on the surface step morphology of 4H–SiC grown from Si–Cr–C solution
Mitani, Takeshi, Komatsu, Naoyoshi, Takahashi, Tetsuo, Kato, Tomohisa, Harada, Shunta, Ujihara, Toru, Matsumoto, Yuji, Kurashige, Kazuhisa, Okumura, HajimeVolume:
423
Langue:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2015.04.032
Date:
August, 2015
Fichier:
PDF, 806 KB
english, 2015