
CMOS integrated chemical microsensors
Steiner, Franz-Peter, Baltes, HenryVolume:
62
Langue:
english
Journal:
tm - Technisches Messen
DOI:
10.1524/teme.1995.62.jg.250
Date:
January, 1995
Fichier:
PDF, 3.32 MB
english, 1995