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Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave
Song, Min-Kyoo, Jhang, Kyung-YoungVolume:
2013
Année:
2013
Langue:
english
Journal:
Advances in Materials Science and Engineering
DOI:
10.1155/2013/950791
Fichier:
PDF, 1.30 MB
english, 2013