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A reliability study of titanium silicide lines using micro-Raman spectroscopy and emission microscopy
I. de Wolf, D.J. Howard, M. Rasras, A. Lauwers, K. Maex, G. Groeseneken, H.E. MaesVolume:
37
Année:
1997
Langue:
english
Pages:
4
DOI:
10.1016/s0026-2714(97)00117-0
Fichier:
PDF, 326 KB
english, 1997