Effect of Bridging Groups of Precursors on Modulus Improvement in Plasma-Enhanced Copolymerized Low-k Films
Kawahara, Jun, Kunimi, Nobutaka, Nakano, Akinori, Kinoshita, Keizo, Hayashi, Yoshihiro, Komatsu, Masashi, Seino, Yutaka, Ichikawa, Rie, Takasu, Yuko, Kikkawa, TakamaroVolume:
154
Année:
2007
Langue:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2429048
Fichier:
PDF, 414 KB
english, 2007