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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Design Approach and Realization of Integrated Silicon Piezoresistive Pressure Sensors for Wide Application Ranges
Schreiber-Prillwitz, Wolfgang, Saukoski, Mikko, Chmiel, Gerhard, Job, ReinhartAnnée:
2010
Langue:
english
DOI:
10.1149/1.3484137
Fichier:
PDF, 488 KB
english, 2010