[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Diode Analysis of Electrically Active Defects in Recessed SiGe Source/Drain Diodes
Simoen, Eddy R., Bargallo Gonzalez, Mireia, Eneman, Geert, Verheyen, Peter, Claeys, C. L., Benedetti, Antonio, Bender, Hugo, De Meyer, Krtistien, Schreutelkamp, Robert, Washington, Lori, Nouri, FaranVolume:
3
Année:
2006
Langue:
english
DOI:
10.1149/1.2355861
Fichier:
PDF, 254 KB
english, 2006