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Effect of External Stress Applied during Annealing on Hydrogen- and Oxygen-Implanted Silicon
Misiuk, Andrzej, Surma, H.B., Antonova, I.V., Popov, V.P., Bak-Misiuk, Jadwiga, Lopez, M., Romano-Rodríguez, A., Barcz, Adam, Jun, J.Volume:
69-70
Année:
1999
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.69-70.345
Fichier:
PDF, 397 KB
1999