
Growth of Gate Oxides on 4H-SiC by NO at Low Partial Pressures
Haasmann, Daniel, Dimitrijev, Sima, Han, Ji Sheng, Iacopi, AlanVolume:
778-780
Langue:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.778-780.627
Date:
February, 2014
Fichier:
PDF, 657 KB
english, 2014