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Real-time monitoring of MOVPE device growth by reflectance anisotropy spectroscopy and related optical techniques
J.-T. Zettler, K. Haberland, M. Zorn, M. Pristovsek, W. Richter, P. Kurpas, M. WeyersVolume:
195
Année:
1998
Langue:
english
Pages:
12
DOI:
10.1016/s0022-0248(98)00700-3
Fichier:
PDF, 494 KB
english, 1998