SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Mesoscale modeling for SFIL simulating polymerization kinetics and densification
Burns, Ryan L., Johnson, Stephen C., Schmid, Gerard M., Kim, Eui K., Dickey, Michael D., Meiring, Jason, Burns, Sean D., Stacey, Nicholas A., Willson, C. Grant, Convey, Diana, Wei, Yi, Fejes, Peter, GVolume:
5374
Année:
2004
Langue:
english
DOI:
10.1117/12.536216
Fichier:
PDF, 675 KB
english, 2004
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