
SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Innovative molding technologies for the fabrication of components for microsystems
Piotter, Volker, Benzler, Tobias, Hanemann, Thomas, Woellmer, Heinz, Ruprecht, Robert, Hausselt, Juergen H., Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean MicheVolume:
3680
Année:
1999
Langue:
english
DOI:
10.1117/12.341233
Fichier:
PDF, 2.82 MB
english, 1999