[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Investigation of Ni reaction with amorphous SiGeC thin film
Chen, Tao, Liu, Jian-ping, Zhou, Mi, Wang, Wei, Tan, Jing-jing, Qu, Xin-pingAnnée:
2006
Langue:
english
DOI:
10.1109/icsict.2006.306646
Fichier:
PDF, 167 KB
english, 2006