[IEEE 2004 International Conference on Integrated Circuit Design and Technology - Austin, TX, USA (17-20 May 2004)] 2004 International Conference on Integrated Circuit Design and Technology (IEEE Cat. No.04EX866) - Plasma damage considerations involving metal-insulator-metal (MIM) capacitors
O'Connell, B., Thibeault, T., Chaparala, P.Année:
2004
Langue:
english
DOI:
10.1109/icicdt.2004.1309925
Fichier:
PDF, 296 KB
english, 2004