Reliability of Thin Thermally Grown SiO2 on 3C-SiC Studied by Scanning Probe Microscopy
Eriksson, Jens, Weng, Ming Hung, Roccaforte, Fabrizio, Giannazzo, Filippo, Fiorenza, Patrick, Lorenzzi, Jean, Ferro, Gabriel, Raineri, VitoVolume:
645-648
Langue:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.833
Date:
April, 2010
Fichier:
PDF, 586 KB
english, 2010