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SPIE Proceedings [SPIE Microtechnologies for the New Millennium - Maspalomas, Gran Canaria, Spain (Wednesday 2 May 2007)] Photonic Materials, Devices, and Applications II - Formation of 4-beam laser interference patterns for nanolithography
Zhang, Jin, Wang, Zuobin, Verevkin, Yury K., Olaizola, Santiago M., Peng, Changsi, Tan, Chunlei, Rodriguez, Ainara, Daume, Eric Y., Berthou, Thierry, Tisserand, Stéphane, Ji, Ze, Serpengüzel, Ali, BadVolume:
6593
Année:
2007
Langue:
english
DOI:
10.1117/12.723782
Fichier:
PDF, 391 KB
english, 2007