Transformations Produced by Ion Implantation in Ion-Beam Amorphized Semiconductors
Verner, Igor V., Gerasimenko, Nikolai N., Corbett, James W.Volume:
90
Année:
1992
Langue:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.90.64
Fichier:
PDF, 1.52 MB
english, 1992