High-Rate Epitaxy of Anatase Films by Atmospheric Chemical Vapor Deposition
Tokita, Shuji, Tanaka, Norio, Saitoh, HidetoshiVolume:
39
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.L169
Date:
February, 2000
Fichier:
PDF, 1.22 MB
english, 2000