Characterization of Nano-crystalline Diamond Films Grown Under Continuous DC Bias During Plasma Enhanced Chemical Vapor Deposition
Mortet, Vincent, Zhang, Liang, Echert, Maxie, Soltani, Ali, D'Haen, Jan, Douhéret, Olivier, Moreau, Myriam, Osswald, Sebastian, Neyts, Erik, Troadec, David, Wagner, Patrick, Bogaerts, Annemie, Van TenVolume:
1203
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1203-J05-03
Date:
January, 2009
Fichier:
PDF, 2.64 MB
english, 2009
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