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SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS - Paris, France (Tuesday 9 May 2000)] Design, Test, Integration, and Packaging of MEMS/MOEMS - Technical comparison of micro-electrodischarge machining, microdrilling, and copper vapor laser machining for the fabrication of ink jet nozzles
Allen, David M., Almond, Heather J. A., Logan, Peter, Courtois, Bernard, Crary, Selden B., Gabriel, Kaigham J., Karam, Jean Michel, Markus, Karen W., Tay, Andrew A. O.Volume:
4019
Année:
2000
Langue:
english
DOI:
10.1117/12.382322
Fichier:
PDF, 2.64 MB
english, 2000