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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - Sharp trench waveguide bend with photonic crystals: simulation, fabrication and characterization
Cui, Xudong, Hafner, Christian, Robin, Franck, Erni, Daniel, Tavzarashvili, Kakhaber, Vahldieck, Ruediger, Bosse, Harald, Bodermann, Bernd, Silver, Richard M.Volume:
6617
Année:
2007
Langue:
english
DOI:
10.1117/12.726017
Fichier:
PDF, 493 KB
english, 2007