Laser interference as a lithographic nanopatterning tool
van Rijn, Cees J. M.Volume:
5
Langue:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2173269
Date:
January, 2006
Fichier:
PDF, 971 KB
english, 2006