SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Advances in multilayer reflective coatings for extreme ultraviolet lithography
Folta, James A., Bajt, Sasa, Barbee, Jr., Troy W., Grabner, R. Fred, Mirkarimi, Paul B., Nguyen, Tai D., Schmidt, Mark A., Spiller, Eberhard A., Walton, Christopher C., Wedowski, Marco, Montcalm, ClauVolume:
3676
Année:
1999
Langue:
english
DOI:
10.1117/12.351156
Fichier:
PDF, 443 KB
english, 1999
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