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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Advances in Resist Materials and Processing Technology XXVIII - High-sensitivity EUV resists based on fluorinated polymers
Yamashita, Tsuneo, Allen, Robert D., Somervell, Mark H., Morita, Masamichi, Tanaka, Yoshito, Santillan, Julius Joseph, Itani, ToshiroVolume:
7972
Année:
2011
Langue:
english
DOI:
10.1117/12.879568
Fichier:
PDF, 709 KB
english, 2011