SrTa 2 O 6 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
Lee, Won-Jae, You, In-Kyu, Ryu, Sang-Ouk, Yu, Byoung-Gon, Cho, Kyoung-Ik, Yoon, Soon-Gil, Lee, Chun-SuVolume:
40
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.6941
Date:
December, 2001
Fichier:
PDF, 593 KB
english, 2001