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Contact size scaling of a W-contact phase-change memory cell based on numerical simulation
Wei, Yiqun, Lin, Xinnan, Jia, Yuchao, Cui, Xiaole, Zhang, Xing, Song, ZhitangVolume:
33
Langue:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/33/10/104006
Date:
October, 2012
Fichier:
PDF, 1.52 MB
english, 2012