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Determination of the electron energy distribution function via optical emission spectroscopy and a Langmuir probe in an ICP
Bibinov, N, Halfmann, H, Awakowicz, PVolume:
17
Langue:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/17/3/035004
Date:
August, 2008
Fichier:
PDF, 133 KB
english, 2008