Improvement of fabrication and characterization methods for micromechanical disk resonators
Zhao, Hui, Luo, Wei, Zheng, Hai-Yang, Yang, Jin-Ling, Yang, Fu-HuaVolume:
21
Langue:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/21/10/100702
Date:
October, 2012
Fichier:
PDF, 286 KB
english, 2012