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Non-Conventional Characterization of Electrically Active Dopant Profiles in Al-Implanted Ge by Depth-Resolved Micro-Raman Spectroscopy
Sanson, Andrea, Napolitani, Enrico, Giarola, Marco, Impellizzeri, Giuliana, Privitera, Vittorio, Mariotto, Gino, Carnera, AlbertoVolume:
6
Langue:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.6.042404
Date:
April, 2013
Fichier:
PDF, 383 KB
english, 2013