Fabrication of Al/AlO x /Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process
Wu, Yu-Lin, Deng, Hui, Yu, Hai-Feng, Xue, Guang-Ming, Tian, Ye, Li, Jie, Chen, Ying-Fei, Zhao, Shi-Ping, Zheng, Dong-NingVolume:
22
Langue:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/22/6/060309
Date:
June, 2013
Fichier:
PDF, 409 KB
english, 2013