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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Optical Measurement Systems for Industrial Inspection V - White light interferometry in combination with a nanopositioning and nanomeasuring machine (NPMM)
Kapusi, Daniel, Machleidt, Torsten, Franke, Karl-Heinz, Jahn, Rainer, Osten, Wolfgang, Gorecki, Christophe, Novak, Erik L.Volume:
6616
Année:
2007
Langue:
english
DOI:
10.1117/12.726114
Fichier:
PDF, 1.19 MB
english, 2007