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SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Advances in Resist Technology and Processing XXIII - The effects of etch chemistry on the etch rates of ArF BARC products
Zhuang, Hong, Abdallah, Dave, Xiang, Zhong, Wu, Hengpeng, Shan, Jianhui, Lu, Ping-Hung, Neisser, Mark, Karwacki, Eugene J., Ji, Bing, Badowski, Peter R., Lin, QinghuangVolume:
6153
Année:
2006
Langue:
english
DOI:
10.1117/12.657128
Fichier:
PDF, 233 KB
english, 2006