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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V - Materials development for photo-inhibited super-resolution (PINSR) lithography
Forman, Darren L., Heuvelman, Gerrit L., McLeod, Robert R., Schoenfeld, Winston V., Rumpf, Raymond C., von Freymann, GeorgVolume:
8249
Année:
2012
Langue:
english
DOI:
10.1117/12.908512
Fichier:
PDF, 919 KB
english, 2012