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Fabrication method of low f-number microlens arrays by using surface coating and epoxy dispensing technology
Li, Pei, Pei, Jing, Pan, Long-fa, Zappe, HansVolume:
13
Langue:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.13.2.023004
Date:
April, 2014
Fichier:
PDF, 1.71 MB
english, 2014