SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - All-silicon microforce sensor for bio applications
Stavrov, Vladimir T., Shulev, Assen A., Hardalov, Chavdar M., Todorov, Vencislav M., Roussev, Ilia R., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Année:
2013
Langue:
english
DOI:
10.1117/12.2017368
Fichier:
PDF, 702 KB
english, 2013